Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate. Jurnal Elektronika dan Telekomunikasi, [S. l.], v. 17, n. 2, p. 36–41, 2017. DOI: 10.14203/jet.v17.36-41. Disponível em: https://jurnalet.brin.go.id/jet/article/view/164. Acesso em: 9 jun. 2026.